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ISO 5302:2003
M00000259
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ISO 5302:2003 Vacuum technology - Turbomolecular pumps - Measurement of performance characteristics
standard by International Organization for Standardization, 07/15/2003
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Full Description
ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.