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ISO 27893:2011

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ISO 27893:2011 Vacuum technology - Vacuum gauges - Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge

standard by International Organization for Standardization, 08/15/2011

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ISO 27893:2011 gives guidelines for the determination and reporting of measurement uncertainties arising during vacuum gauge calibration by direct comparison with a reference gauge carried out in accordance with ISO/TS 3567.

ISO 27893:2011 describes methods for uniform reporting of uncertainties in vacuum gauge certificates. Uncertainties reported in accordance with the guidelines given in ISO 27893:2011 are transferable in the sense that the uncertainty evaluated for one result can be used as a component in the uncertainty evaluation of another measurement or calibration in which the first result is used.

ISO 27893:2011 defines two measurement models that are sufficient to cover most practical cases. However, it is possible that the models given cannot be applied to newly developed vacuum gauges.