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ISO 19606:2017
M00000345
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ISO 19606:2017 Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for surface roughness of fine ceramic films by atomic force microscopy
standard by International Organization for Standardization, 02/01/2017
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ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 m to 2,5 m.