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ISO 16700:2016
M00005268
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ISO 16700:2016 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
standard by International Organization for Standardization, 08/01/2016
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ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.