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BS 10/30211446 DC
M00000343
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BS 10/30211446 DC BS EN 62047-11. Semiconductor devices. Micro-electromechanical devices. Part 11. Test method for linear thermal expansion coefficients of MEMS materials
standard by BSI Group, 03/11/2010
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Cross References:
IEC 62047-1
IEC 62047-3
All current amendments available at time of purchase are included with the purchase of this document.