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BS 07/30163302 DC
M00000557
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BS 07/30163302 DC BS EN 62047-6. Semiconductor devices. Micro-electromechanical devices. Part 6. Axial fatigue testing methods of thin film materials
standard by BSI Group, 03/06/2007
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Cross References: IEC 62047-2*ASTM E 1823-05a*ISO 1099*ASTM E 466-96*ISO 6892*ISO 12107*