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ASTM E1127-08

M00011471

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ASTM E1127-08 Standard Guide for Depth Profiling in Auger Electron Spectroscopy

standard by ASTM International, 10/01/2008

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1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2 Guidelines are given for depth profiling by the following:

Section
Ion Sputtering6
Angle Lapping and Cross-Sectioning7
Mechanical Cratering8
Mesh Replica Method9
Nondestructive Depth Profiling10

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.4 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.