Process Technology for Silicon Carbide Devices

This book explains why SiC is so useful in electronics, gives clear guidance on the various processing steps (growth, doping, etching, contact formation, dielectrics etc) and describes how these are integrated in device manufacture. The book should serve as an advanced tutorial and reference for those involved in applying the very latest technology emerging from university and commercial laboratories around the world.

Book DOI:10.1049/PBEP002E
Chapter DOI:10.1049/PBEP002E
ISBN: 9780852969984
e-ISBN: 9781849193719
Page count: 200
Format: PDF