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MEMS Packaging discusses the prevalent practices and enabling techniques in assembly, packaging and testing of microelectromechanical systems (MEMS). The entire spectrum of assembly, packaging and testing of MEMS and mircrosystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering is covered. Other topics included are bonding and sealing of microcomponents, process flow of MEMS and microsystems packaging, automated microassembly, and testing and design for testing.
Book DOI:10.1049/PBEP003E
Chapter DOI:10.1049/PBEP003E
ISBN: 9780863413353
e-ISBN: 9781849190626
Page count: 305
Format: PDF