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This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching.
Book DOI:10.1049/PBEP006E
Chapter DOI:10.1049/PBEP006E
ISBN: 9780863413537
e-ISBN: 9781849190688
Page count: 368
Format: PDF